There are various types of abatement equipment, including combustion, plasma, heater, dry, and catalytic systems. Point-of-use (POU) abatement is connected to multiple chambers for each process (Dry Etching, CVD), and there is a demand for improved abatement efficiency. As a means of measuring the abatement efficiency, the in-line INDIR: IR-400 series and the Q-Mass: RGA described in the EPA430 protocol will help customers improve their measurement and detection capabilities.
用于腔室清洗终点监测的高级气体监测仪
Quadrupole Mass Analyzer